Local Loops for Robust Inter-Layer Routing at Sub-20 nm Nodes
W. Huang, D. Morris, N. Lafferty, L. Liebmann, K. Vaidyanathan, K. Lai, L. Pileggi, A.J. Strojwas, “Local Loops for Robust Inter-Layer Routing at Sub-20 nm Nodes”, SPIE Advanced Lithography Conference, February 2012.
Leave a Reply
Want to join the discussion?Feel free to contribute!