Design and Manufacturability Tradeoffs in Unidirectional & Bidirectional Standard Cell Images in 14 nm

K. Vaidyanathan, S.H. NG, D. Morris, N. Lafferty, L. Liebmann, W. Huang, K. Lai, L. Pileggi, A.J. Strojwas, “Design and Manufacturability Tradeoffs in Unidirectional & Bidirectional Standard Cell Images in 14 nm”, SPIE Advanced Lithography Conference, February 2012.

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