Self-healing Narrowband Filters via 3D Heterogeneous Integration of AlN MEMS and CMOS chips
E. Calayir, J. Xu, L. Pileggi, G. K. Fedder, N. Singh, S. Merugu and G. Piazza, “Self-healing Narrowband Filters via 3D Heterogeneous Integration of AlN MEMS and CMOS chips”, 2017 IEEE International Ultrasonics Symposium (IUS), Washington, D.C., September 2017.
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