Performance and Manufacturability Trade-offs of Pattern Minimization for sub-22nm Technology Nodes

V. Rovner, T. Jhaveri, Daniel Morris, Andrzej J. Strojwas, and Larry Pileggi, “Performance and Manufacturability Trade-offs of Pattern Minimization for sub-22nm Technology Nodes”, SPIE Advanced Lithography Conference, February 2011.

0 replies

Leave a Reply

Want to join the discussion?
Feel free to contribute!

Leave a Reply