Design Implications of Extremely Restricted Patterning
K. Vaidyanathan, R. Liu, L. Liebmann, K. Lai, A. Strojwas, L. Pileggi, “Design Implications of Extremely Restricted Patterning”, Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol 13 (03), 2014.
Leave a Reply
Want to join the discussion?Feel free to contribute!