Application of the Cost-Per-Good-Die Metric for Process-Design Co-optimization
T. Jhaveri, U. Urslan, V. Rovner, L. Pileggi & A. J. Strojwas, “Application of the Cost-Per-Good-Die Metric for Process-Design Co-optimization”, SPIE Advanced Lithography Conference, Selected for Keynote Presentation, February 2010.
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