3D Integration of AlN MEMS Filters and CMOS for Self-Healing RF Front-Ends
E. Calayir, J. Xu, A. Patterson, G. K. Fedder, G. Piazza, L. Pileggi, “3D Integration of AlN MEMS Filters and CMOS for Self-Healing RF Front-Ends”,Government Microcircuit Applications and Critical Technology Conference, March 2015.
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