Application of the Cost-Per-Good-Die Metric for Process-Design Co-optimization

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T. Jhaveri, U. Urslan, V. Rovner, L. Pileggi & A. J. Strojwas, “Application of the Cost-Per-Good-Die Metric for Process-Design Co-optimization”, SPIE Advanced Lithography Conference, Selected for Keynote Presentation, February 2010.

Demonstrating the benefits of template-based design-technology co-optimization

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L. Liebmann, J. Hibbeler, N. Hieter, L. Pileggi, M. Moe, T. Jhaveri, V. Rovner, “Demonstrating the benefits of template-based design-technology co-optimization”, SPIE Advanced Lithography Conference, February 2010.