Inside CODEF

Data Representation

The underlying data structure of CODEF is essentially a 3-D corner-stitched database (see figure below). From the top, a databaase can be viewed as a 2-D corner-stitched rectangles. Each rectangle contains a stack of layers. Each layer can represent metal, poly-silicon, resist, oxide silicon, air, or contamination.

 

Process Steps

CODEF is capable of emulating many process steps. Below is a list of the major steps.

  • Contamination Deposition
  • Oxidation and Annealing
  • Layer Etch
  • Metal Deposition
  • Photo Lithography
  • Ion Impllantation
  • Etch-back
  • Contamination Deposition
  • Chemical-Mechanical Polishing (currently under development)

 

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