General area of interest: semiconductor process technology, device physics, and sensors
1974-1979 | Optical processes in MOS capacitors (Ph.D. thesis) |
1980-1982 | Polysilicon fuses and antifuses |
1982-1988 | Polysilicon junctions and polysilicon emitter transistors |
1982-1988 | Thin film transistors for active matrix displays |
1988-1990 | Thin films of high temperature superconductors |
1995-1997 | Surface processes during growth of boron nitride |
1995-1998 | Semiconductor process control |
1995-2001 | Wide gap semiconductors |
1989-2001 | Germanium-silicon-carbon alloys: growth and applications |
1998-2001 | MEMS-based data storage |
1999-2001 | Quantum dots and application |
2000-2005 | Biological sensing |
2009 | Novel ultrasonic motors |
2000-present | Infrastructure sensing |
2009-present | Surface acoustic wave devices for sensing |