The heart of the simulator is the event handler which communicates with six sub-modules: the wafer movement simulator (WSIM), the yield simulator (YSIM), the failure analysis simulator (FASIM), the in-line particle monitor simulator (PSIM), the cost simulator (COSIM) and the probe tester simulator (TSIM). The operation of the event handler and these six modules can be controlled through the simulation control unit. The user can implement different models using the toolkit of functions provided for accessing and modifying the common database for all the modules and the event handling routines. A basic user interface is available to read input files for the models, output the statistics gathered and customize the simulation control strategy.     Figure 3. Y4 Software Structure.
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