capacitive MEMS ultrasonic transducers (cMUTs)

SEM photograph of cMUT.

Cross sectional drawing of cMUT.

Journal articles

  1. Greve, D., Oppenheim, I., and Jain, A., "Electrical characterization of coupled and uncoupled MEMS ultrasonic transducers," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, March 2003, 297-304.
  2. Greve, D., Jain, A., and Oppenheim, I., "MEMS ultrasonic transducers for the testing of solids," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, March 2003, 305-311.

Conference publications

  1. Jain, A., Greve, D. W., and Oppenheim, I. J., “A MEMS Transducer for Ultrasonic Flaw Detection,” International Symposium on Automation and Robotics in Construction ISARC 2002, Washington, D.C., September 2002.
  2. Jain, A., Greve, D.W., and Oppenheim, I. J., "A MEMS Phased Array Transducer for Ultrasonic Flaw Detection," IEEE Sensors 2002, Orlando, June 2002.
  3. Jain, A., Greve, D.W., and Oppenheim, I. J., "A MEMS Ultrasonic Transducer for Monitoring of Steel Structures," Proceedings of SPIE Vol. 4696, Smart Structures and Materials -- Smart Systems for Bridges, Structures, and Highways, Paper 4696-31, San Diego, March 2002.
  4. Greve, D.W., Jain, A., and Oppenheim, I. J., "MEMS Phased Array Detection in Contact with Solids," IEEE Ultrasonics Conference, Munich, October 2002.
  5. Oppenheim, I. J., Jain, A., and Greve, D. W., "Design and Testing of a MEMS Ultrasonic Transducer for Flaw Detection," Transportation Research Board Annual Meeting, Washington, D.C., January 2003.
  6. Jain, A., Greve, D.W., and Oppenheim, I. J., "Experiments in Ultrasonic Flaw Detection using a MEMS Transducer," SPIE Smart Structures Conference SN09: Smart and NDE for Civil Infrastructure, San Diego, March 2003.
  7. Greve, D. W., and Oppenheim, I. J., "Coupling of MEMS Ultrasonic Transducers," IEEE Sensors 2003, Toronto, October 2003.
  8. Greve, D. W., Neumann, J. J., Oppenheim, I. J., Ozevin, D., and Pessiki, S. P., "Robust Capacitive MEMS Ultrasonic Transducers for Liquid Immersion," IEEE Ultrasonics Conference, Honolulu, November 2003.
  9. Greve, D. W., Oppenheim, I. J., and Williams, W. O., "Theory of a Double-Diaphragm MEMS Ultrasonic Transducer," IEEE Ultrasonics Conference, Honolulu, November 2003.
  10. Neumann, J. J., Greve, D. W., and Oppenheim, I. J., "Comparison of Piezoresistive and Capacitive Ultrasonic Transducers," SPIE Smart Structures Conference SN09, San Diego, March 2004.
  11. Oppenheim, I., Greve, D., Neumann, J., Ozevin, D., and Pessiki, S., "Development of MEMS Sensors for Structural Health Monitoring," Fourth International Workshop on Structural Control, Columbia University, June 2004.