Text Box: Conference Publications

[1] L. Shi and G. Piazza, “Ion-Sliced Lithium Niobate on Silicon Dioxide for Engineering the Temperature Coefficient of Frequency of Laterally Vibrating Resonators”, accepted for publication at IEEE IFCS 2013, July 2013. (nominated for Best Paper Award).

[2] J. Segovia, C. Cassella, G. Piazza, “Close-in Phase Noise Reduction in an Oscillator based on 222 MHz Non-Linear Contour Mode AlN Resonators”, accepted for publication at IEEE IFCS 2013, July 2013. (nominated for Best Paper Award).

[3] G. Piazza, A.Tazzoli, N. Miller1, J. Segovia, C. Cassella, J. Koo, B. Otis, K. McNaul, B. Gibson, K. Turner, T. Palmer, “Dynamics of Microscale Thin Film AlN Piezoelectric Resona-tors Enables Low Phase Noise UHF Frequency Sources”, accepted for publication at IEEE IFCS 2013, July 2013.

[4] C. Cassella, M. Cremonesi, J. Segovia, A. Frangi, G. Piazza, “Reduction of Anchor Losses by Etched Slots in Aluminum Nitride Contour Mode Resonators”, accepted for publication at IEEE IFCS 2013, July 2013.

[5] N. Miller and G. Piazza, “Nonlinear Dynamics in Aluminum Nitride Contour-Mode Resonators”, accepted for publication at IEEE IFCS 2013, July 2013.

[6] N. Miller and G. Piazza, “Vector Network Analyzer Measurements of Frequency Fluctuations in Aluminum Nitride Contour-Mode Resonators”, accepted for publication at IEEE IFCS 2013, July 2013.

[7] J. Segovia, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza, “Experimental Study on the Impact of Anchors Losses on the Quality Factor of Contour Mode AlN Resonators”, accepted for publication in 17th International Conference on Solid-State Sensors, Actuators, and Microsystems, Transducers’ 2013, June 2013.

[8] C. Cassella, J. Segovia, and G. Piazza, “Segmented Electrode Excitation of Aluminum Nitride Contour Mode Resonators to Optimized the Device Figure of Merit”, accepted for publication in 17th International Conference on Solid-State Sensors, Actuators, and Microsystems, Transducers’ 2013, June 2013.

[9] S. Gong and G. Piazza, “Large Frequency Tuning of Lithium Niobate Laterally Vibrating MEMS Resonators via Electric Boundary Reconfiguration”, accepted for publication in 17th International Conference on Solid-State Sensors, Actuators, and Microsystems, Transducers’ 2013, June 2013.

[10] H. Sumbul, L. Pileggi, G. K. Fedder, G. Piazza, F. Franchetti, and A. Patterson, "Trusted Split-Fabrication  System-on-Chip Design Technology and Methodology," GOMACTech-13, Session 29:IARPA Trusted Integrated  Chips Program, May 2013.

[11] S. Gong and G. Piazza, "Multi-Frequency Wideband RF Filters using High Electromechanical Coupling Laterally Vibrating Lithium Niobate MEMS Resonators," in Micro Electro Mechanical Systems(MEMS), 2013, IEEE 26th International Conference on, pp. 785-788, Jan. 2013.

[12] S. Gong and G. Piazza, "Weighted Electrode Configuration for Electromechanical Coupling Enhancement in a New Class of Micromachined Lithium Niobate Laterally Vibrating Resonators," in 2012 IEEE International Electron Device Meeting. pp. 15.6.1 - 15.6.4, Dec. 2012.

[13] S. Gong and G. Piazza, "Laterally Vibrating Lithium Niobate MEMS Resonators with High Electromechanical Coupling and Quality Factor," in 2012 IEEE International Ultrasonic Symposium. Oct 2012.

[14] S. Gong, L. Shi, and G. Piazza, "High electromechanical coupling resonators using ion sliced X-cut LiNbO3 thin fi
lm," in 2012 IEEE MTT-S int. Microwave Symp. Dig. pp. 1-3, 17-22, June, 2012.

[15] M. Giovannini, S. Yazici, N.K. Kuo, G. Piazza, “Apodization Techniques for Spurious Mode Suppression in 900 MHz AlN Contour-Mode Resonators”, accepted for publication in Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, June 2012. 

[16] C. Zuniga, M. Rinaldi, A. Tazzoli, G. Piazza, “Single Transistor Oscillator based on Piezoelectric Resonant Nanochannel for Operation in Liquids”, accepted for publication in Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, June 2012. 

[17] M. Rinaldi, A. Tazzoli, C. Zuniga, G. Piazza, “970 MHz Ovenized Oscillator based on an AlN MEMS Resonator with Monolithically Integrated Suspended Nano Hot Plate”, accepted for publication in Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, June 2012.

[18] M. Giovannini, S. Yazici, N.K. Kuo, G. Piazza, “Spurious Mode Suppression via Apodization for 1 GHz AlN Contour-Mode Resonators”, accepted for publication in IEEE Frequency Control Symposium 2012.

[19] A. Tazzoli, M. Rinaldi, G. Piazza, “Ultra High Frequency Temperature Compensated Oscillators Based on Ovenized AlN Contour-Mode MEMS Resonators”, accepted for publication in IEEE Frequency Control Symposium 2012.

[20] M. Rinaldi, C. Zuniga, A. Tazzoli, G. Piazza, “High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation”, accepted for publication in IEEE Frequency Control Symposium 2012.

[21] N.K. Kuo, G. Piazza, “1 GHz Bulk Acoustic Wave Slanted Finger Interdigital Trans-ducers in Aluminum Nitride for Wideband Applications” accepted for publication in IEEE Frequency Control Symposium 2012.

[22] S. Yazici, M. Giovannini, N.K. Kuo, G. Piazza, “Suppression of Spurious Modes via Dummy Electrodes and 2% Frequency Shift via Cavity Size Selection for 1 GHz AlN MEMS Contour-Mode Resonators”, accepted for publication in IEEE Frequency Control Symposium 2012.

[23] S. Ghosh and G. Piazza, "Grating Couplers and Ring Resonator in Aluminum Nitride," Conference on Lasers and Electro-Optics (CLEO 2012), San Jose, CA, May 6-11, 2012, CM2M.6.

[24] A. Tazzoli, G. Piazza, M. Rinaldi, J. Segovia, C. Cassella, B. Otis, J. Shi, K. Turner, C. Burgner, K. McNaul, D. Bail, V. Felmetsger, “Piezoelectric Non-Linear Nanomechanical Temperature and Acceleration Insensitive Clocks”, Invited paper at SPIE 2012, Baltimore, April 2012.

[25] N. Kuo, S. Gong, G. Piazza, “Micromachined Sapphire GHz Lateral Overtone Bulk Acoustic Resonators Transduced by Aluminum Nitride”, IEEE MEMS 2012, pp. 27 – 30, January 2012.

[26] S. Gong, N. Kuo, G. Piazza, “Geometry Optimization for Quality Factor Enhancement in SiC-based Lateral Overtone Bulk Acoustic-wave Resonators”, IEEE MEMS 2012, pp. 692 – 695, January 2012.

[27] N. Sinha, Z. Guo, A. Tazzoli, A. De Hon, G. Piazza, “1 V Digital Logic Circuits Realized by Stress Resilient Parallel Dual-Beam MEMS Relays”, IEEE MEMS 2012, pp. 668 – 671, January 2012.

[28] M. Rinaldi, A. Tazzoli, J. Segovia, V. Felmetsger, G. Piazza,”High Power and Low Temperature Coefficient of Frequency Oscillator Based on a Fully Anchored and Oxide Compensated AlN Contour-Mode Resonator”, IEEE MEMS 2012, pp. 696– 699, January 2012.

[29] A. Tazzoli, M. Rinaldi, C. Zuo, N. Sinha, J. Van der Spiegel, G. Piazza, “Aluminum Nitride Reconfigurable RF-MEMS Front-Ends”, IEEE 9th International Conference on ASIC, 2012. (Invited Contribution).

[30] A. Tazzoli, M. Rinaldi, G. Piazza, “Ovenized High Frequency Oscillators Based on Aluminum Nitride Contour Mode MEMS Resonators”, IEEE IEDM 2011, pp. 20.2.1-20.2.4, December 2011.

[31] J. Segovia, A. Tazzoli, M. Rinaldi, G. Piazza, “Nonlinear lumped electrical model for Contour Mode AlN Resonators”, IEEE Internatio​nal Ultrasonic​s Symposium 2011.

[32] S. Gong, N. Kuo, G. Piazza, “A 1.75 GHz SiC Lateral Overtone Bulk Acoustic-Wave Resonator”, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International , vol., no., pp.922-925, 5-9 June 2011

[33] M. Rinaldi, G. Piazza, “Effects of Volume and Frequency Scaling in AlN Contour Mode NEMS Resonators on Oscillator Phase Noise”, accepted for publication at IEEE Frequency Control Symposium 2011.

[34] N. Kuo, G. Piazza, “Ultra High Frequency Air/Aluminum Nitride Fractal Phononic Crystals”, accepted for publication at IEEE Frequency Control Symposium 2011.

[35] S. Gong, N. Kuo, G. Piazza, “Study of AlN Lateral Overtone Bulk Acoustic Resonators”, accepted at IEEE frequency control symposium 2011.

[36] N. Kuo, S. Gong, G. Piazza, “Ultra High Frequency Fractal Phononic Crystal in Silicon Carbide”, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, vol., no., pp. 2486-2489, 5-9 June 2011.

[37] Z. Guo, N. Sinha, G. E. Wabiszewski, R. W. Carpick, A. De Hon, G. Piazza, “Energy Efficient Piezoelectric Aluminum Nitride Nano Switches for Mechanical Computing”, accepted for publication at GOMACTech 2011, Orlando, FL, March 21-24, 2011.

[38] C. Zuo, J. Van der Spiegel, G. Piazza, “Switch-Less Dual-Frequency Reconfigurable CMOS Oscillator Using One Single Piezoelectric AlN MEMS Resonator with Co-Existing S0 and S1 Lamb-Wave Modes”, IEEE MEMS 2011, Cancun, Mexico, 23-27 January, pp. 177-180.

[39] C. Zuniga, M. Rinaldi, G. Piazza, “Reduced Viscous Damping in High Frequency Piezoelectric Resonant Nanochannels for Sensing in Fluids”, IEEE MEMS 2011, Cancun, Mexico, 23-27 January, pp. 960-963.

[40] N. Kuo, G. Piazza, “1 GHz Phononic Band Gap Structure in Air/Aluminum Nitride for Symmetric Lamb Waves”, IEEE MEMS 2010, Cancun, Mexico, 23-27 January, pp. 740-743.

[41] M. Rinaldi, C. Zuniga, G. Piazza, “Ss-DNA Functionalized Array of AlN Contour-Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for Sub-ppb Detection of Volatile  Organic Chemicals”, IEEE MEMS 2011, Cancun, Mexico, 23-27 January, pp. 976-979.

[42] C. Zuniga, M. Rinaldi, G. Piazza, “High Frequency Piezoelectric Resonant Nanochannel  for Bio-Sensing Applications in Liquid Environment”, IEEE Sensors 2010, Waikoloa, Hawaii, USA, 01-04 November 2010, pp. 52-55.

[43] M. Rinaldi, C. Zuniga, G. Piazza, “Use of a Single Multiplexed CMOS Oscillator as Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”,  IEEE Sensors 2010, Waikoloa, Hawaii, USA, 01-04 November 2010, pp. 2666-2670.

[44] G. Piazza, M. Rinaldi, C. Zuniga, “Nanoscaled Piezoelectric Aluminum Nitride Contour-Mode Resonant Sensors”,  IEEE Sensors 2010, Waikoloa, Hawaii, USA, 01-04 November 2010, pp. 2202-2207.

[45] M. Rinaldi, C. Zuo, G. Piazza, “Reconfigurable 4-Frequency CMOS Oscillator Based on AlN Contour-Mode MEMS Resonators”, IEEE Ultrasonics  2010.

[46] C. Zuo, J. Van der Spiegel, G. Piazza, “1.5-GHz CMOS Voltage-Controlled Oscillator   Based On Thickness-Field-Excited Piezoelectric   AlN Contour-Mode MEMS Resonators”, CICC 2010.

[47] M. Rinaldi, C. Zuniga, C. Zuo and G. Piazza, "GHz Range Nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator", Proceedings of the  Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, 06-10 June 2010, pp. 471-474. (PDF)

[48] N. Sinha, Z. Guo, V. V. Felmetsger and G. Piazza, “100nm Thick Aluminum Nitride Based Piezoelectric Nano Switches Exhibiting 1mV Threshold Voltage Via Body-Biasing,” 2010 Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, SC, June 2010, pp. 352-355. (PDF)

[49] N. Kuo, G. Piazza, “Evidence of Acoustic Wave Focusing in a Microscale 630 MHz Aluminum Nitride Phononic Crystal Waveguide”, IEEE Frequency Control Symposium, June 2010, pp. 530 - 533, June 2010.

[50] C. Zuo, G. Piazza, “Single-Ended-to-Differential and Differential-to-Differential Chan-nel-Select Filters based on Single-Layer and Dual-Layer-Stacked Piezoelectric AlN Contour-Mode MEMS Resonators”, to be presented at IEEE Frequency Control Symposium, June 2010.

[51] G. Piazza, “Aluminum Nitride Piezoelectric NEMS Resonators and Switches”, presented at SPIE, Orlando, FL, April 2010.

[52] M. Rinaldi, B. Duick, C. Zuniga, C. Zuo and G. Piazza, “ss-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile Organic Chemical Detection”, MEMS 2010, pp. 132 – 135, 2010. (PDF)

[53] Nipun Sinha, Timothy Jones, Zhijun Guo and Gianluca Piazza, “Demonstration of Low Voltage and Functionally Complete Logic Operations Using Body-Biased Complimentary and Ultra-Thin AlN Piezoelectric Mechanical Switches”, MEMS 2010, pp.751-754, 2010. (PDF)

[54] Chengjie Zuo, Nipun Sinha, and Gianluca Piazza, “Novel Electrode Configurations in Dual-Layer Stacked and Switchable AlN Contour-Mode Resonators for Low Impedance Filter Termination and Reduced Insertion Loss”, MEMS 2010, pp. 719-722, 2010.

[55] N. Sinha, T. S. Jones, Z. Guo and G. Piazza, “Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches”, 2009 IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, USA, December 2009, pp. 813-816. (PDF)

[56] C. Zuniga, M. Rinaldi and G. Piazza, "Quality Factor of MEMS and NEMS AlN Contour-Mode Resonators in Liquid Media", IEEE International Ultrasonics Symposium 2009, pp. 2568 – 2571, Rome, Italy, 20-23 September 2009.

[57] M. Rinaldi, C. Zuniga,  and G. Piazza, "Ultra-Thin AlN Contour-Mode Resonators for Sensing Applications", IEEE International Ultrasonics Symposium 2009, pp. 714 – 717, Rome, Italy, 20-23 September 2009.

[58] C. Zuo, M. Rinaldi and G. Piazza, "Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators", IEEE International Ultrasonics Symposium 2009, pp. 1187 – 1190, Rome, Italy, 20-23 September 2009

[59] N. Kuo, C. Zuo, G. Piazza, “Demonstration of Inverse Acoustic Band Gap Structure in AlN and Integration with Piezoelectric Contour Mode Transducers”, 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 2334 – 2337, June 21 - 25, 2009.

[60] N. Sinha, G.E. Wabiszewski, R. Mahameed, V. Felmetsger, S. Tanner, R.W. Carpick and G. Piazza, “Ultra Thin AlN  Piezoelectric Nano-Actuators”, 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Tranducers 2009), Denver, Colorado, USA, 21-25 June 2009, pp. 469-472. (PDF)

[61] M. Rinaldi, C. Zuniga,  C. Zuo, and G. Piazza, "Ultra-Thin Super High Frequency two-port AlN Contour-Mode Resonators and Filters", 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Tranducers 2009), Denver, Colorado, USA, 21-25 June 2009, pp. 577-580. (PDF)

[62] N. Kuo, C. Zuo, G. Piazza, “Demonstration of an Inverse Acoustic Band Gap Structure in AlN and Integration with Piezoelectric Contour Mode Wideband Transducers”, IEEE Frequency Control Symposium, April 2009.

[63] N. Sinha, C. Zuo, R. Mahameed, G. Piazza, “Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches”, IEEE Frequency Control Symposium, April 2009, pp. 1-4 (PDF).

[64] M. Rinaldi, C. Zuniga, C. Zuo, G. Piazza, “AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz”,  IEEE Frequency Control Symposium, April 2009 (Best paper award in Group 1). (PDF)

[65] C. Zuo, J. Van der Spiegel, G. Piazza, “1.05 GHz MEMS Oscillator Based On Lateral-Field-Excited Piezoelectric AlN Resonators”, IEEE Frequency Control Symposium, April 2009, pp. 381-384. (PDF)

[66] C. Perez, G. Piazza, “Bandwidth Control in Acoustically Coupled AlN Contour Mode MEMS Filters”, IEEE Frequency Control Symposium, April 2009.

[67] D. Cappelleri, G. Piazza, V. Kumar, “Two-Dimensional, Vision-Based μN Force Sensor for Microrobotics”, ICRA 2009.

[68] M. Rinaldi, C. Zuniga, G. Piazza “5 – 10 GHz AlN Contour-Mode NanoElectroMechanical Resonators”, IEEE MEMS, pp. 916-919, 2009. (PDF)

[69] C. Zuniga, M. Rinaldi, S. Khamis, T.S. Jones, A.T. Johnson, G. Piazza “DNA-Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant-MEMS Gravimetric Sensors”, IEEE MEMS, pp. 320-323, 2009.

[70] M. Rinaldi, C. Zuniga, M. Taheri, S. Khamis, A.T. Johnson, G. Piazza “Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEM Resonators”, IEEE Frequency Control Symposium, pp. 443-448,  2008. (PDF)

[71] C. Zuo, N. Sinha, J. Van Der Spiegel, G. Piazza “Multi-Frequency Pierce Oscillators Based on Piezoelectric AlN Contour-Mode MEM Resonators”, IEEE Frequency Control Symposium, pp. 402-407, 2008. (Best Paper Award in Group 2). (PDF)

[72] N. Sinha, R. Mahameed, C. Zuo, M.B. Pisani, C.R. Perez, G. Piazza, “Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators”, Workshop on Solid State Sensors and Actuators, Hilton Head, pp. 22-25, 2008. (PDF)

[73] C. Zuo, N. Sinha, C.R. Perez, R. Mahameed, M.B. Pisani, G. Piazza “ Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour-Mode MEMS Resonators”, Workshop on Solid State Sensors and Actuators, Hilton Head, pp. 324-327, 2008. (PDF)

[74] C. Zuo, N. Sinha, M. B. Pisani, C. R. Perez, R. Mahameed, G. Piazza, “Channel-Select RF MEMS Filters Based On Self-Coupled AlN Contour-Mode Piezoelectric Resonators”, to be presented at IEEE Ultrasonics Symposium. (PDF)

[75] G. Piazza, “Contour-Mode Aluminum Nitride Vibrating RF Microsystems”, presented at Frequency Control Symposium, June 2007 (invited). (PDF)

[76] G. Piazza, P.J. Stephanou, A.P. Pisano, “AlN Contour-Mode Vibrating RF MEMS for Next Generation Wireless Communications”, Invited Paper, ESSDERC 2006. (PDF)

[77] G. Piazza, P.J. Stephanou, A.P. Pisano, “One and Two Port Piezoelectric Contour- Mode MEMS Resonators for Frequency Synthesis”, ESSDERC 2006. (PDF)

[78] G. Piazza, P.J. Stephnaou, A.P. Pisano, “AlN Contour-Mode Vibrating RF MEMS”, IMS 2006. (PDF)

[79] P.J. Stephanou, G. Piazza, C.D. White, M.B.J. Wijesundara, and A.P. Pisano,” Design of Novel Mechanical Coupling for Contour Mode Piezoelectric RF MEMS Filters”, iMEMS 2006. (PDF)

[80] P. J. Stephanou, G. Piazza, C. D. White, M. B. J. Wijesundara, and A. P. Pisano, "Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters," IEEE MEMS 2006, pp. 906-909, 2006. (PDF)

[81] P. J. Stephanou, G. Piazza, C. D. White, M. B. J. Wijesundara, and A. P. Pisano, "Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter," Proceedings of ASME IMECE 2005, IMECE05-81679, 2005. (PDF)

[82] G. Piazza, P.J. Stephanou, J.P. Black, R.M. White and A. P. Pisano, "Single-Chip Multiple-Frequency RF Microresonators based on Contour-Mode and FBAR Technologies," 2005 IEEE Ultrasonic Symposium, Rotterdam, pp. 1187 - 1190, 2005.  (PDF)

[83] G. Piazza and A.P. Pisano, “Two-Port Stacked Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators”, presented at EurosensorsXIX, Barcelona, 2005. (PDF)

[84] G. Piazza, P. J. Stephanou, M. B. J. Wijesundara, and A. P. Pisano, "Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators," in Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers, TRANSDUCERS '05, pp. 2065-68. (PDF)

[85] G. Piazza, P. J. Stephanou, J. M. Porter, M. B. J. Wijesundara, and A. P. Pisano, "Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications," presented at 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS’ 05, pp.20-23. (PDF)

[86] G. Piazza and A. P. Pisano, "Dry-Released Post-CMOS Compatible Contour-Mode Aluminum Nitride Micromechanical Resonators for VHF Applications," presented at 2004 Solid-State Sensor, Actuator and Microsystems Workshop Hilton Head Island, SC, 2004, pp.37-40. (PDF)

[87] S. Humad, R. Abdolvand, G. K. Ho, G. Piazza, and F. Ayazi, "High frequency micromechanical piezo-on-silicon block resonators," presented at IEEE International Electron Devices Meeting 2003, pp.39.3.1-4. (PDF)

[88] G. Piazza, R. Abdolvand, and F. Ayazi, "Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substrate," presented at Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS’03, pp.149-152. (PDF)

 

Piazza Micro and Nano Systems Laboratory

 

“Making MEMS and NEMS”

Micromechanical Signal Processors

Nanomechanical Sensors

Nanomechanical Logic