Gary K. Fedder
Associate Dean for Research, College of Engineering
Howard M. Wilkoff Professor of Electrical and Computer Engineering
Professor of The Robotics Institute

5000 Forbes Ave.
Carnegie Mellon University
Pittsburgh, PA 15213-3890

Office
2215 Hamburg Hall
(p) (412)-268-8443
(fax) (412)-268-5229
fedder@cmu.edu

Administrative Assistant
Tamara Alkhattar
2213 Hamburg Hall
(p) (412)-268-7221
(fax) (412)-268-5229
tamaraa@andrew.cmu.edu
Affiliations and Profiles
Institute for Complex Engineered Systems (ICES)
Department of Electrical and Computer Engineering
The Robotics Institute
Department of Mechanical Engineering (Courtesy Faculty)
Department of Biomedical Engineering (Courtesy Faculty)
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Bio
Dr. Fedder earned his B.S. and M.S. degrees in EECS(6.1) from MIT in 1982 and 1984, respectively. From 1984 to 1989, he worked at the Hewlett-Packard Company on circuit design and printed-circuit modeling. In 1994, he obtained the Ph.D. degree in EECS from the University of California at Berkeley, where his research resulted in the first demonstration of multimode control of an underdamped surface-micromachined inertial device. His research interests include design and modeling of microsensors and microactuators, fabrication of integrated MEMS with electronic circuits using conventional CMOS processing, and implantable microsystems. In 2007, he was elevated to IEEE Fellow for contributions to integrated micro-electro-mechanical-system processes and design methodologies. His awards include the 1993 AIME Electronic Materials Society Ross Tucker Award, the 1996 Carnegie Institute of Technology George Tallman Ladd Research Award, and a 1996 NSF CAREER Award.

Currently, he serves as the Americas' regional editor for the IoP Journal of Micromechanics and Microengineering, on the editorial board of IET Micro & Nano Letters, and as co-editor of the Wiley-VCH Advanced Micro- and Nanosystems book series. He served on the editorial board of the IEEE Journal of Microelectromechanical Systems from 2001 to 2013 and on the editorial board of SPIE Journal of Micro/Nanolithography, MEMS, and MOEMS from 2010 to 2013. He is the 2015 Transducers Conference regional program chair for the Americas, to be held June 21-25, 2015 in Anchorage, Alaska. He served as general co-chair of the 2005 IEEE MEMS Conference and as general chair of the 2010 IEEE Sensors Conference. Professor Fedder has contributed to over 240 research publications and holds several patents in the MEMS area.
Research - MEMS Laboratory - Microsystems Research Cluster

My research interests are in the multidisciplinary area of microelectromechanical systems (MEMS), and focus primarily on design, fabrication, and control aspects of microsensor- and microactuator-based systems. In MEMS, micron- to millimeter-size systems with sophisticated abilities to interact with their environment are manufactured through the use of VLSI-based photolithographic batch fabrication methods. Benefits of this approach include much lower manufacturing cost, greater miniaturization, greater integration, and in many cases higher performance than can be achieved with conventional methods used to build systems requiring sensors and actuators.

The diverse set of research projects in my group links to a long-term trend toward low-cost intelligent systems that benefit from embedded MEMS, often merged with other emerging technologies, for example, nanomaterials, 3D printing and soft robotics. Active projects include MEMS system modeling and design methodologies, accelerometers and gyroscopes for motion sensing, an electrothermal microcooler system, ultra-compliant neural probes, piezoelectric energy scavenging for implantable pressure sensors, nonlinear parametric microresonators, and self-healing RF microresonator oscillators and filters. Challenges include system design, process integration, and physical modeling including environmental effects.

Two legacy foundational themes in my group are 1) monolithic integration of MEMS in covnetional foundry CMOS processes and 2) a system-level design methodology and corresponding simulation tools. Continuing research along these themes involves emergent behavior of large and/or complex systems of microsensors and actuators, and a broadening of manufacturing capabilities for integrated MEMS.


Revised: October 5, 2014 by fedder@cmu.edu